Nanolayered multilayer coatings of CrN/CrAlN prepared by reactive DC magnetron sputtering

Applied Surface Science

Volumn 253, Issue 11, 2007, Pages 5076-5083

  Barshilia, Harish C ^a   Deepthi, B ^a   Selvakumar, N ^a   Jain, Anjana ^a   Rajam, K S ^a  

^a SURFACE ENGINEERING DIVISION   (India)

Author keywords

CrN and CrAlN films; CrN CrAlN nanolayered multilayers; Magnetron sputtering; Structural and mechanical properties; Thermal stability

Indexed keywords

MAGNETRON SPUTTERING; MULTILAYERS; SILICON; SUBSTRATES; THERMODYNAMIC STABILITY; X RAY DIFFRACTION; X RAY PHOTOELECTRON SPECTROSCOPY;

DC MAGNETRON SPUTTERING SYSTEMS; MILD STEEL SUBSTRATES; MULTILAYER COATINGS; NANOLAYERED MULTILAYERS;

CHROMATE COATINGS;

EID: 33847301542     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2006.11.021     Document Type: Article

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