SCOPUS 정보 검색 플랫폼

Volumn 503, Issue 1-2, 2006, Pages 158-166

A comparative study on the structure and properties of nanolayered TiN/NbN and TiAlN/TiN multilayer coatings prepared by reactive direct current magnetron sputtering

(5) Barshilia, Harish C a Rajam, K S a Jain, Anjana a Gopinadhan, K b Chaudhary, Sujeet b

a SURFACE ENGINEERING DIVISION (India)

b INDIAN INSTITUTE OF TECHNOLOGY DELHI (India)

Author keywords

Hard coatings; Hardness; Multilayers; Niobium nitride; Sputtering; Titanium nitride; X ray diffraction

Indexed keywords

HARDNESS; MAGNETRON SPUTTERING; MULTILAYERS; NIOBIUM COMPOUNDS; RAMAN SPECTROSCOPY; TITANIUM NITRIDE; X RAY DIFFRACTION;

HARD COATINGS; NIOBIUM NITRIDE;

COATINGS;

EID: 33644791755 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/j.tsf.2005.12.074 Document Type: Article

Times cited : (56)

References (33)

1
- 0026852996
- M. Shinn, L. Hultman, and S.A. Barnett J. Mater. Res. 7 1992 901
- (1992) J. Mater. Res. , vol.7 , pp. 901
- Shinn, M.¹ Hultman, L.² Barnett, S.A.³

2
- 21544437674
- U. Helmersson, S. Todorova, S.A. Barnett, J.E. Sundgren, L.C. Markert, and J.E. Greene J. Appl. Phys. 62 1987 481
- (1987) J. Appl. Phys. , vol.62 , pp. 481
- Helmersson, U.¹ Todorova, S.² Barnett, S.A.³ Sundgren, J.E.⁴ Markert, L.C.⁵ Greene, J.E.⁶

3
- 0033943750
- Y.M. Zhou, R. Asaki, K. Higashi, W.H. Soe, and R. Yamamoto Surf. Coat. Technol. 130 2000 9
- (2000) Surf. Coat. Technol. , vol.130 , pp. 9
- Zhou, Y.M.¹ Asaki, R.² Higashi, K.³ Soe, W.H.⁴ Yamamoto, R.⁵

4
- 0032387139
- H. Ljungcrantz, E. Engstrom, L. Hultman, M. Olsson, X. Chu, M.S. Wong, and W.D. Sproul J. Vac. Sci. Technol., A, Vac. Surf. Films 16 1998 3104
- (1998) J. Vac. Sci. Technol., A, Vac. Surf. Films , vol.16 , pp. 3104
- Ljungcrantz, H.¹ Engstrom, E.² Hultman, L.³ Olsson, M.⁴ Chu, X.⁵ Wong, M.S.⁶ Sproul, W.D.⁷

5
- 2442505578
- H.C. Barshilia, and K.S. Rajam Surf. Coat. Technol. 183 2004 174
- (2004) Surf. Coat. Technol. , vol.183 , pp. 174
- Barshilia, H.C.¹ Rajam, K.S.²

6
- 2942622047
- H.C. Barshilia, M.S. Prakash, A. Poojari, and K.S. Rajam Thin Solid Films 460 2004 133
- (2004) Thin Solid Films , vol.460 , pp. 133
- Barshilia, H.C.¹ Prakash, M.S.² Poojari, A.³ Rajam, K.S.⁴

7
- 0031147876
- M. Larsson, M. Bromark, P. Hedenqvist, and S. Hogmark Surf. Coat. Technol. 91 1997 43
- (1997) Surf. Coat. Technol. , vol.91 , pp. 43
- Larsson, M.¹ Bromark, M.² Hedenqvist, P.³ Hogmark, S.⁴

8
- 33644792962
- in press
- H.C. Barshilia, K.S. Rajam, D.V.S. Rao, Surf. Coat. Technol. (in press).
- Surf. Coat. Technol.
- Barshilia, H.C.¹ Rajam, K.S.² Rao, D.V.S.³

9
- 25544459890
- W.D. Munz J. Vac. Sci. Technol., A, Vac. Surf. Films 4 1986 2717
- (1986) J. Vac. Sci. Technol., A, Vac. Surf. Films , vol.4 , pp. 2717
- Munz, W.D.¹

10
- 0027589851
- H. Ichimura, and A. Kawana J. Mater. Res. 8 1993 1093
- (1993) J. Mater. Res. , vol.8 , pp. 1093
- Ichimura, H.¹ Kawana, A.²

11
- 13944274472
- D. McIntyre, J.E. Greene, G. Hakansson, J.E. Sundgren, and W.D. Munz J. Appl. Phys. 67 1990 1542
- (1990) J. Appl. Phys. , vol.67 , pp. 1542
- McIntyre, D.¹ Greene, J.E.² Hakansson, G.³ Sundgren, J.E.⁴ Munz, W.D.⁵

12
- 0032184141
- J.H. Hsieh, C. Liang, C.H. Yu, and W. Wu Surf. Coat. Technol. 108-109 1998 132
- (1998) Surf. Coat. Technol. , vol.108-109 , pp. 132
- Hsieh, J.H.¹ Liang, C.² Yu, C.H.³ Wu, W.⁴

13
- 0034707773
- K.N. Andersen, E.J. Bienk, K.O. Schweitz, H. Reitz, J. Chevallier, P. Kringhoj, and J. Bottiger Surf. Coat. Technol. 123 2000 219
- (2000) Surf. Coat. Technol. , vol.123 , pp. 219
- Andersen, K.N.¹ Bienk, E.J.² Schweitz, K.O.³ Reitz, H.⁴ Chevallier, J.⁵ Kringhoj, P.⁶ Bottiger, J.⁷

14
- 0035063976
- E. Zoestbergen, N.J.M. Carvalho, and J.T.M. De Hosson Surf. Eng. 17 2001 29
- (2001) Surf. Eng. , vol.17 , pp. 29
- Zoestbergen, E.¹ Carvalho, N.J.M.² De Hosson, J.T.M.³

15
- 1342310601
- F.-R. Weber, F. Fontaine, M. Scheib, and W. Block Surf. Coat. Technol. 177-178 2004 227
- (2004) Surf. Coat. Technol. , vol.177-178 , pp. 227
- Weber, F.-R.¹ Fontaine, F.² Scheib, M.³ Block, W.⁴

16
- 0037124994
- H.C. Barshilia, and K.S. Rajam Surf. Coat. Technol. 155 2002 195
- (2002) Surf. Coat. Technol. , vol.155 , pp. 195
- Barshilia, H.C.¹ Rajam, K.S.²

17
- 0142217260
- H.C. Barshilia, A. Jain, and K.S. Rajam Vacuum 72 2004 241
- (2004) Vacuum , vol.72 , pp. 241
- Barshilia, H.C.¹ Jain, A.² Rajam, K.S.³

18
- 0032394142
- P. Yashar, S.A. Barnett, J. Rechner, and W.D. Sproul J. Vac. Sci. Technol., A, Vac. Surf. Films 16 1998 2913
- (1998) J. Vac. Sci. Technol., A, Vac. Surf. Films , vol.16 , pp. 2913
- Yashar, P.¹ Barnett, S.A.² Rechner, J.³ Sproul, W.D.⁴

19
- 0000961419
- P.B. Mirkarimi, L. Hultman, and S.A. Barnett Appl. Phys. Lett. 57 1990 2654
- (1990) Appl. Phys. Lett. , vol.57 , pp. 2654
- Mirkarimi, P.B.¹ Hultman, L.² Barnett, S.A.³

20
- 0027579598
- X. Chu, S.A. Barnett, and M.S. Wong Surf. Coat. Technol. 57 1993 13
- (1993) Surf. Coat. Technol. , vol.57 , pp. 13
- Chu, X.¹ Barnett, S.A.² Wong, M.S.³

21
- 21544460243
- X. Chu, and S.A. Barnett J. Appl. Phys. 77 1995 4403
- (1995) J. Appl. Phys. , vol.77 , pp. 4403
- Chu, X.¹ Barnett, S.A.²

22
- 35949040064
- J.S. Koehler Phys. Rev., B 2 1970 547
- (1970) Phys. Rev., B , vol.2 , pp. 547
- Koehler, J.S.¹

23
- 0033467857
- C. Engstrom, J. Birch, L. Hultman, C. Lavoie, C. Cabral, J.L. Jordan-Sweet, and J.R.A. Carlsson J. Vac. Sci. Technol., A, Vac. Surf. Films 17 1999 2920
- (1999) J. Vac. Sci. Technol., A, Vac. Surf. Films , vol.17 , pp. 2920
- Engstrom, C.¹ Birch, J.² Hultman, L.³ Lavoie, C.⁴ Cabral, C.⁵ Jordan-Sweet, J.L.⁶ Carlsson, J.R.A.⁷

24
- 0029184654
- M. Franck, J.-P. Celis, and J.R. Roos J. Mater. Res 10 1995 119
- (1995) J. Mater. Res , vol.10 , pp. 119
- Franck, M.¹ Celis, J.-P.² Roos, J.R.³

25
- 0018877762
- M. Grundner, and J. Halbritter J. Appl. Phys 51 1980 397
- (1980) J. Appl. Phys , vol.51 , pp. 397
- Grundner, M.¹ Halbritter, J.²

26
- 11244250899
- H.C. Barshilia, and K.S. Rajam J. Mater. Res. 19 2004 3196
- (2004) J. Mater. Res. , vol.19 , pp. 3196
- Barshilia, H.C.¹ Rajam, K.S.²

27
- 10844239699
- H.C. Barshilia, M.S. Prakash, A. Jain, and K.S. Rajam Vacuum 77 2005 169
- (2005) Vacuum , vol.77 , pp. 169
- Barshilia, H.C.¹ Prakash, M.S.² Jain, A.³ Rajam, K.S.⁴

28
- 0031235205
- W.H. Soe, and Y. Yamamoto Mater. Chem. Phys. 50 1997 176
- (1997) Mater. Chem. Phys. , vol.50 , pp. 176
- Soe, W.H.¹ Yamamoto, Y.²

29
- 0002037856
- M. Shinn, and S.A. Barnett Appl. Phys. Lett. 64 1994 61
- (1994) Appl. Phys. Lett. , vol.64 , pp. 61
- Shinn, M.¹ Barnett, S.A.²

30
- 0028457062
- P.B. Mirkarimi, S.A. Barnett, K.M. Hubbard, and T.R. Jervis J. Mater. Res. 9 1994 1456
- (1994) J. Mater. Res. , vol.9 , pp. 1456
- Mirkarimi, P.B.¹ Barnett, S.A.² Hubbard, K.M.³ Jervis, T.R.⁴

31
- 33644812422
- B.X. Huang, K. Wang, J.S. Church, and Y.S. Li Electrochimica 44 1999 2577
- (1999) Electrochimica , vol.44 , pp. 2577
- Huang, B.X.¹ Wang, K.² Church, J.S.³ Li, Y.S.⁴

32
- 0033323046
- C.P. Constable, J. Yarwood, and W.D. Munz Surf. Coat. Technol. 116-119 1999 155
- (1999) Surf. Coat. Technol. , vol.116-119 , pp. 155
- Constable, C.P.¹ Yarwood, J.² Munz, W.D.³

33
- 0028338157
- H. Ichimura, and A. Kawana J. Mater. Res. 9 1994 151
- (1994) J. Mater. Res. , vol.9 , pp. 151
- Ichimura, H.¹ Kawana, A.²

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.