XPS investigations of chromium nitride thin films

Surface and Coatings Technology

Volumn 200, Issue 1-4 SPEC. ISS., 2005, Pages 250-253

  Lippitz, A ^a   Hübert, Thomas ^a  

^a BAM FEDERAL INSTITUTE FOR MATERIALS RESEARCH AND TESTING   (Germany)

Author keywords

CrN thin films; ESCA; Physical vapour deposition (PVD); XPS

Indexed keywords

CHROMIUM COMPOUNDS; COMPOSITION EFFECTS; NITROGEN; PHASE COMPOSITION; PHYSICAL VAPOR DEPOSITION; PRESSURE EFFECTS; SPUTTER DEPOSITION; SURFACE PROPERTIES; THERMOGRAVIMETRIC ANALYSIS; THIN FILMS; X RAY DIFFRACTION ANALYSIS; X RAY PHOTOELECTRON SPECTROSCOPY;

AVERAGE BULK COMPOSITIONS; CHROMIUM NITRIDE; FILM COATINGS; FILM SURFACE;

INORGANIC COATINGS;

FILM;

EID: 24644434946     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2005.02.091     Document Type: Article

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