Deposition of TiN/CrN hard superlattices by reactive d.c. magnetron sputtering

Bulletin of Materials Science

Volumn 26, Issue 2, 2003, Pages 233-237

  Barshilia, Harish C ^a   Rajam, K S ^a  

^a SURFACE ENGINEERING DIVISION   (India)

Author keywords

AFM; d.c. reactive magnetron sputtering; Nanoindentation; Structural and mechanical properties; TiN CrN superlattices

Indexed keywords

ATOMIC FORCE MICROSCOPY; CHROMIUM COMPOUNDS; HARDNESS; ION BOMBARDMENT; MAGNETRON SPUTTERING; MECHANICAL VARIABLES MEASUREMENT; PARTIAL PRESSURE; PHYSICAL VAPOR DEPOSITION; STRUCTURE (COMPOSITION); TITANIUM NITRIDE; X RAY DIFFRACTION ANALYSIS;

MULTILAYER SUPERLATTICE COATINGS; NANOINDENTATION;

SUPERLATTICES;

EID: 0037331265     PISSN: 02504707     EISSN: None     Source Type: Journal    
DOI: 10.1007/BF02707797     Document Type: Article

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