Optical and surface analysis of DC-reactive sputtered AlN films

Diamond and Related Materials

Volumn 12, Issue 8, 2003, Pages 1315-1321

  Mahmood, A ^a   Machorro, R ^a   Muhl, S ^b   Heiras, J ^a   Castillon F F ^a   Farias M H ^a   Andrade, E ^a  

^a UNIVERSIDAD NACIONAL AUTÓNOMA DE MÉXICO   (Mexico)

^b INSTITUTO DE INVESTIGACIONES EN MATERIALES   (Mexico)

Author keywords

Aluminium nitride; Ellipsometry; Film; Oxidation; Sputtering

Indexed keywords

ALUMINUM NITRIDE; ATOMIC FORCE MICROSCOPY; COMPOSITION; FOURIER TRANSFORM INFRARED SPECTROSCOPY; MAGNETRON SPUTTERING; SCANNING ELECTRON MICROSCOPY; X RAY ANALYSIS; X RAY PHOTOELECTRON SPECTROSCOPY;

DEPOSITION PARAMETERS;

THIN FILMS;

DIAMOND;

EID: 0041621825     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-9635(03)00076-1     Document Type: Article

References (39)

1. Brunner, D., Angerer, H., & Bustarret, E. (1997). J. Appl. Phys.. 82 5090.
2. A. Mahmood, N. Rakov, M. Xiao, Mater. Lett., in press
3. Yoder, M. N. (1996). IEEE Trans. Electron Devices. 43 1633.
4. Huang, J. S., Dong, X., & Luo, X. D. (2003). J. Crystal Growth. 247 84.
5. Dupuie, J. L., & Gulari, E. (1992). J. Vac. Sci. Technol. A. 10 18.
6. Huttel, Y., Gomez, H., Cebollada, A., Armelles, G., & Alonso, M. I. (2002). J. Crystal Growth. 242 116.
7. Bensalem, R., Abid, A., & Selly, B. J. (1986). Thin Solid Films. 143 141.
8. Baier, H. -U, & Moench, W. (1992). Appl. Surf. Sci.. 56-58 766.
9. Sitar, Z., Smith, L. L., & Davis, R. F. (1994). J. Crystal Growth. 141 11.
10. Six, S., & Rauschenbach, B. (2002). Thin Solid Films. 415 285.
11. Li, X., & Tansley, T. L. (1990). J. Appl. Phys.. 68 5369.
12. Zhang, W., Someno, Y., Sasaki, M., & Hirai, T. (1993). J. Crystal Growth. 130 308.
13. Aardahl, C. R., Rogers, J. W., Yun, H. K., Ono, Y., Tweet, D. C., & Hsu, S. -T (1999). Thin Solid Films. 346 174.
14. Lavrenko, V. A., Desmaison, J., Panasyuk, A. D., & Desmaison-Brut, M. (2003). J. Eur. Ceram. Soc.. 23 357.
15. Slack, G. A., Schowalter, L. J., Morelli, D., & Freitas, J. A. (2002). J. Crystal Growth. 246 287.
16. Ansart, F., Ganda, H., Saporte, R., & Traverse, J. P. (1995). Thin Solid Films. 260 38.
17. Andrade, E. (1991). Nucl. Instr. Meth. Phys. Res. B. 57 802.
18. M. Mayer, SIMNRA User's Guide. Technical Report IPP 9/113, Max Plank Institut fur Plasmaphysik, Garching, Germany
19. Bunsha, R. F. (1982). Deposition Technologies for Films and Coatings. 214. Norwich, USA: Noyes.
20. Loughin, S., & French, R. H. (1998). Handbook of Optical Constants of Solids III. In Palik (Ed.), 373. : Academic Press.
21. Joo, H. Y., Kim, H. J., Kim, S. J., & Kim, S. Y. (2000). Thin Solid Films. 368 67.
22. Gadenne, M., Plon, J., & Gaddene, P. (1998). Thin Solid Films. 333 251.
23. Joo, H. -Y, Kim, H. J., Kim, S. J., & Kim, S. Y. (1999). J. Vac. Sci. Technol. A. 17 862.
24. Manova, D., Dimitrova, V., Fukarek, W., & Karpuzov, D. (1998). Surf. Coat. Technol.. 106 205.
25. Taylor, J. A., & Rabalais, J. W. (1981). J. Chem. Phys.. 75 1735.
26. Schoser, S., Brauchle, G., & Forget, J. (1998). Surf. Coat. Technol.. 103 222.
27. Moulder, J. F., Stickle, W. F., Sobol, P. E., & Bomben, K. D. (1992). Handbook of X-Ray Photoelectron Spectroscopy. Eden Prairie, USA: Perkin-Elmer Corporation.
28. Huang, J., Wang, L., Shen, Q., Lin, C., & Ostling, M. (1999). Thin Solid Films. 340 137.
29. Laidani, N., Vanzetti, L., Anderle, M., Basillais, A., Boulmer-Leborgne, C., & Perriere, J. (1999). Surf. Coat. Technol.. 122 242.
30. Duez, N., Mutel, B., Dessaus, O., Goundman, P., & Grimblot, J. (2000). Surf. Coat. Technol.. 125 79.
31. Rossi, F., Andre, B., & van Vin, A. (1994). Thin Solid Films. 253 118.
32. Weich, F., Widany, J., & Frauenheim, Th . (1997). Phys. Rev. Lett.. 78 3326.
33. Soto, G., Samano, E. C., Machorro, R., Farias, M. H., & Cota-Araiza, L. (2001). Appl. Surf. Sci.. 183 246.
34. Wagner, C. D., Passoja, D. E., & Hillery, H. F. (1982). J. Vac. Sci. Technol.. 21 933.
35. Nefedov, V. I., Gati, D., Dzhurinskii, B. F., Sergushin, N. P., & Saljn, Y. V. (1975). Zh. Neorg. Khim.. 20 2307.
36. Takagi-Kawai, M., Soma, M., Onishi, T., & Tamaru, K. (1980). Can. J. Chem.. 58 2132.
37. Stoyanov, P., Akhter, S., & White, J. M. (1990). Surf. Interface Anal.. 15 509.
38. Fern, G., Rojas-Lorenzo, G., Odriozola, J. A., & Alvarez, L. J. (2002). Chem. Phys. Lett.. 356 127.
39. Ribeiro, C. T., Zanata, A. R., & Alvarez, F. (2002). J. Non-Cryst. Sol.. 299-302 323.