SCOPUS 정보 검색 플랫폼

Superlattices and Microstructures

Volumn 36, Issue 4-6, 2004, Pages 409-416

Mechanical and physicochemical properties of AlN thin films obtained by pulsed laser deposition

(6) Cibert, C a Tetard F b Djemia, P b Champeaux, C a Catherinot, A a Tetard D a

a UNIVERSITY OF LIMOGES (France)

b UNIVERSITÉ PARIS 13 (France)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; FOURIER TRANSFORM INFRARED SPECTROSCOPY; HYDROPHOBICITY; INTERFACIAL ENERGY; LIGHT SCATTERING; MICROELECTROMECHANICAL DEVICES; OPTOELECTRONIC DEVICES; PIEZOELECTRIC MATERIALS; PULSED LASER DEPOSITION; SILICON; THIN FILMS; X RAY DIFFRACTION ANALYSIS;

CRYSTALLINITY; RAYLEIGH WAVE VELOCITY; SUBSTRATE TEMPERATURE; TRANSMISSION SPECTRA;

ALUMINUM NITRIDE;

EID: 9944254643 PISSN: 07496036 EISSN: None Source Type: Journal
DOI: 10.1016/j.spmi.2004.09.055 Document Type: Article

Times cited : (11)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.