Investigation of diffractive optical element fabricated on diamond film by use of focused ion beam direct milling

Optical Engineering

Volumn 42, Issue 8, 2003, Pages 2214-2217

  Fu, Yongqi ^a   Bryan, Ngoi Kok Ann ^b  

^a SINGAPORE MIT ALLIANCE   (Singapore)

^b NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

Diamond film; Diffractive optical element; Focused ion beam milling

Indexed keywords

ATOMIC FORCE MICROSCOPY; CHEMICAL VAPOR DEPOSITION; DIAMOND FILMS; DIFFRACTIVE OPTICS; GRAPHITE; ION BEAM ASSISTED DEPOSITION; MILLING (MACHINING); OPTICAL PROPERTIES; RAMAN SPECTROSCOPY; REFRACTIVE INDEX; SURFACE ROUGHNESS;

ANNULUS WIDTH; DIFFRACTIVE OPTICAL ELEMENT; FOCUSED ION BEAM DIRECT MILLING; HOT FILAMENT CHEMICAL VAPOR DEPOSITION;

OPTICAL DEVICES;

EID: 0141518352     PISSN: 00913286     EISSN: None     Source Type: Journal    
DOI: 10.1117/1.1588659     Document Type: Article

References (9)

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