TCAD challenges in the nanotechnology era

International Conference on Simulation of Semiconductor Processes and Devices, SISPAD

Volumn 2005, Issue , 2005, Pages 7-12

  Giles, Martin D ^a  

^a INTEL CORPORATION   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

HIERARCHICAL SYSTEMS; MATHEMATICAL MODELS; PRODUCT DESIGN; SEMICONDUCTOR DEVICE MANUFACTURE;

DEVICE OPERATION; PHYSICAL INSIGHTS; TECHNOLOGY DEVELOPMENT;

NANOTECHNOLOGY;

EID: 33845912676     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/sispad.2005.201460     Document Type: Conference Paper

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