Porogen approach for the fabrication of plasma-polymerized nanoporous polysiloxane films

Journal of Physical Chemistry B

Volumn 110, Issue 41, 2006, Pages 20172-20176

  Oka, Toshitaka ^a,b   Ito, Kenji ^a   Muramatsu, Makoto ^a   Ohdaira, Toshiyuki ^a   Suzuki, Ryoichl ^a   Kobayashi, Yoshinori ^a,b  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

^b Central 5 ^*  (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ELLIPSOMETRY; NANOSTRUCTURED MATERIALS; PARAFFINS; PLASMA POLYMERIZATION; SPECTROSCOPIC ANALYSIS;

CARBONACEOUS AGGREGATES (POROGEN); CYCLOHEXANE; NANOPOROUS FILMS; SPECTROSCOPIC ELLIPSOMETRY;

SILICONES;

EID: 33751263732     PISSN: 15206106     EISSN: None     Source Type: Journal    
DOI: 10.1021/jp063013t     Document Type: Article

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