Mass spectral investigation of the radio-frequency plasma deposition of hexamethyldisiloxane

Journal of Physical Chemistry B

Volumn 101, Issue 18, 1997, Pages 3614-3619

  Alexander, M R ^a   Jones, F R ^a   Short, R D ^a  

^a UNIVERSITY OF SHEFFIELD   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001162612     PISSN: 15206106     EISSN: None     Source Type: Journal    
DOI: 10.1021/jp970663b     Document Type: Article

References (17)

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