Water interaction with thermally oxidized porous silicon layers

Journal of the Electrochemical Society

Volumn 144, Issue 11, 1997, Pages 4027-4035

  Zangooie, S ^a   Bjorklund, R ^a   Arwin, H ^a  

^a LINKÖPING UNIVERSITY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

ADSORPTION ISOTHERMS; ELLIPSOMETRY; MATHEMATICAL MODELS; OXIDATION; POROSITY; POROUS SILICON; SURFACE PHENOMENA; WATER;

LIQUID PENETRATION; VARIABLE ANGLE SPECTROSCOPIC ELLIPSOMETRY; WATER VAPOR ADSORPTION;

ADSORPTION;

EID: 0031274496     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1838130     Document Type: Article

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