In-situ mass spectrometry analyses of the fragmentation of linear and cyclic siloxanes in a glow discharge compared with ex-situ FTIR analyses of the deposits

Chemical Vapor Deposition

Volumn 8, Issue 4, 2002, Pages 155-161

  Rouessac, Vincent ^a   Roualdes, Stéphanie ^a   Durand, Jean ^a  

^a CNRS   (France)

Author keywords

Cyclic monomers; Mass Spectrometry; Plasma; Siloxanes

Indexed keywords

FOURIER TRANSFORM INFRARED SPECTROSCOPY; FREE RADICALS; MASS SPECTROMETRY; MONOMERS; OLIGOMERS; PLASMA THEORY;

CYCLIC MONOMERS; OXYGEN BARRIERS; POLYMER-LIKE FILMS; PRECURSOR VAPORS;

SILICON COMPOUNDS;

EID: 0040673381     PISSN: 09481907     EISSN: None     Source Type: Journal    
DOI: 10.1002/1521-3862(20020704)8:4<155::AID-CVDE155>3.0.CO;2-R     Document Type: Article

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