Influence of flow ratio on mechanical and tribological properties of hydrogenated carbon nitride films prepared by DC-RF-PECVD

Journal of Physics D: Applied Physics

Volumn 39, Issue 6, 2006, Pages 1149-1155

  Hao, Junying ^a,b   Xu, Tao ^a   Zhang, Junyan ^a   Liu, Weimin ^a  

^a LANZHOU INSTITUTE OF CHEMICAL PHYSICS   (China)

^b UNIVERSITY OF CHINESE ACADEMY OF SCIENCES   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; CARBON NITRIDE; CHEMICAL VAPOR DEPOSITION; FEEDSTOCKS; RAMAN SPECTROSCOPY; SURFACE PROPERTIES; SURFACE ROUGHNESS; WEAR RESISTANCE; X RAY PHOTOELECTRON SPECTROSCOPY;

ADHESION STRENGTH; AMORPHOUS HYDROGENATED CARBON NITRIDE (A-CN : H) FILMS; DEPOSITION RATE; DUAL DIRECT CURRENT RADIO FREQUENCY PLASMA; FLOW RATIO; NANO HARDNESS;

THIN FILMS;

EID: 33751199918     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/39/6/021     Document Type: Article

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