Studies of diamond-like and nitrogen-containing diamond-like carbon using laser Raman spectroscopy

Thin Solid Films

Volumn 283, Issue 1-2, 1996, Pages 145-150

  Shiao, Jeansong ^a,b   Hoffman, Richard W ^a  

^a CASE WESTERN RESERVE UNIVERSITY   (United States)

^b Mosel Vitelic Inc   (Taiwan)

Author keywords

Carbon; Chemical vapor deposition; Diamond; Nitrogen

Indexed keywords

BAND STRUCTURE; CHEMICAL VAPOR DEPOSITION; COMPOSITION; DIAMONDS; ION BEAMS; LASER APPLICATIONS; NITROGEN; OPTICAL PROPERTIES; PLASMA APPLICATIONS; RAMAN SPECTROSCOPY; SPUTTER DEPOSITION;

BAND POSITIONS; DIAMOND LIKE CARBON; INTENSITY RATIOS; LASER RAMAN SPECTROSCOPY; RADIO FREQUENCY PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;

CARBON INORGANIC COMPOUNDS;

EID: 0030233032     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/0040-6090(95)08151-8     Document Type: Article

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