Thermal stability of nanoscale silver metallization in Ag/W/Co/Si(1 0 0) multilayer

Applied Surface Science

Volumn 252, Issue 15, 2006, Pages 5335-5338

  Akhavan, O ^a   Azarm, A ^a   Moshfegh, A Z ^a   Bahrevar, M A ^b  

^a SHARIF UNIVERSITY OF TECHNOLOGY   (Iran)

^b MATERIALS AND ENERGY RESEARCH CENTER   (Iran)

Author keywords

Co silicide; Nano metallization; Silver; W interlayer

Indexed keywords

ATOMIC FORCE MICROSCOPY; CRYSTALLOGRAPHY; HEAT TREATMENT; METALLIZING; MULTILAYERS; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SPUTTERING; THERMODYNAMIC STABILITY; X RAY DIFFRACTION;

CO SILICIDE; INTERDIFFUSION; NANO-METALLIZATION; W INTERLAYER;

SILVER;

EID: 33744548512     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2005.12.070     Document Type: Article

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