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Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6002, Issue , 2005, Pages

Nanoimprint lithography: Review of aspects and applications

(2) Wagner, D J a Jayatissa, A H a

a Toledo (United States)

Author keywords

Nanofabrication; Nanoimprint lithography

Indexed keywords

MOLDING; NANOTECHNOLOGY; OPTICAL RESOLVING POWER; PHOTORESISTS;

NANOIMPRINT LITHOGRAPHY; NANOVOIDS;

LITHOGRAPHY;

EID: 33644638772 PISSN: 0277786X EISSN: None Source Type: Conference Proceeding
DOI: 10.1117/12.631046 Document Type: Conference Paper

Times cited : (13)

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