Bilayer, nanoimprint lithography

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 18, Issue 4, 2000, Pages 1866-1873

  Faircloth, Brian ^a   Rohrs, Henry ^b   Tiberio, Richard ^c   Ruoff, Rodney ^b   Krchnavek, Robert R ^d  

^a Nuvonyx Inc   (United States)

^b WASHINGTON UNIVERSITY   (United States)

^c Department of Obstetrics Gynecology   (United States)

^d ROWAN UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 23044523368     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (12)

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