메뉴 건너뛰기




Volumn 245, Issue 1-4, 2005, Pages 234-239

Optically variable imaging using nanoimprint technique

Author keywords

Diffraction gratings; Nanoimprint lithography; Optically variable imaging

Indexed keywords

DIFFRACTION GRATINGS; ETCHING; IMAGING TECHNIQUES; LITHOGRAPHY; SILICON; SUBSTRATES;

EID: 17044405503     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2004.10.015     Document Type: Article
Times cited : (13)

References (15)
  • 2
    • 17044435356 scopus 로고    scopus 로고
    • http://www.delarue.com.
  • 4
    • 0034207251 scopus 로고    scopus 로고
    • Micro-technology for anti-counterfeiting
    • R.A. Lee Micro-technology for anti-counterfeiting Microelectron. Eng. 53 2000 513 516
    • (2000) Microelectron. Eng. , vol.53 , pp. 513-516
    • Lee, R.A.1
  • 5
    • 0037961581 scopus 로고    scopus 로고
    • Microrelief structures for anti-counterfeiting applications
    • P.W. Leech, and H. Zeidler Microrelief structures for anti-counterfeiting applications Microelectron. Eng. 65 2003 439 446
    • (2003) Microelectron. Eng. , vol.65 , pp. 439-446
    • Leech, P.W.1    Zeidler, H.2
  • 6
    • 0142037327 scopus 로고
    • Imprint of sub-25 nm vias and trenches in polymers
    • S.Y. Chou, P.R. Krauss, and J. Renstrom Imprint of sub-25 nm vias and trenches in polymers Appl. Phys. Lett. 76 1995 3114 3116
    • (1995) Appl. Phys. Lett. , vol.76 , pp. 3114-3116
    • Chou, S.Y.1    Krauss, P.R.2    Renstrom, J.3
  • 7
    • 0031074686 scopus 로고    scopus 로고
    • Imprint lithography with sub-10 nm feature size and high throughput
    • S.Y. Chou, and P.R. Krauss Imprint lithography with sub-10 nm feature size and high throughput Microelectron. Eng. 35 1997 237 240
    • (1997) Microelectron. Eng. , vol.35 , pp. 237-240
    • Chou, S.Y.1    Krauss, P.R.2
  • 15
    • 0347601895 scopus 로고    scopus 로고
    • Rapid evaluation of imprint quality using optical scatterometry
    • D. Jucius, V. Grigaliūnas, and A. Guobienė Rapid evaluation of imprint quality using optical scatterometry Microelectron. Eng. 71 2004 190 198
    • (2004) Microelectron. Eng. , vol.71 , pp. 190-198
    • Jucius, D.1    Grigaliunas, V.2    Guobiene, A.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.