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Surface and Coatings Technology

Volumn 200, Issue 12-13, 2006, Pages 4072-4077

Boron carbide and boron carbonitride thin films as protective coatings in ultra-high density hard disk drives

(3) Chen, Yanfeng a Chung, Yip Wah a Li, Shu You b

a Northwestern University (United States)

b NORTHWESTERN UNIVERSITY (United States)

Author keywords

AES; Boron carbide; Boron carbon nitride; Nano indentation; Pulse DC magnetron sputtering; TEM

Indexed keywords

AUGER ELECTRON SPECTROSCOPY; BORON CARBIDE; BORON COMPOUNDS; COMPRESSIVE STRESS; CORROSION; HARDNESS; INDENTATION; MAGNETRON SPUTTERING; MORPHOLOGY; SUBSTRATES; SURFACE ROUGHNESS; THIN FILMS;

BORON CARBONITRIDE; HARD DISK SUBSTRATES; NANO-INDENTATION; PULSE MAGNETRON SPUTTERING;

PROTECTIVE COATINGS;

AUGER ELECTRON SPECTROSCOPY; BORON CARBIDE; BORON COMPOUNDS; COMPRESSIVE STRESS; CORROSION; HARDNESS; INDENTATION; MAGNETRON SPUTTERING; MORPHOLOGY; PROTECTIVE COATINGS; SUBSTRATES; SURFACE ROUGHNESS; THIN FILMS;

EID: 32644462395 PISSN: 02578972 EISSN: None Source Type: Journal
DOI: 10.1016/j.surfcoat.2005.02.164 Document Type: Article

Times cited : (47)

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