Calibrating ESCA and ellipsometry measurements of perfluoropolyether lubricant thickness

IEEE Transactions on Magnetics

Volumn 34, Issue 4 PART 1, 1998, Pages 1774-1776

  Toney, Michael F ^a,b   Mathew Mate, C ^a   Pocker, Daryl ^a  

^a IBM ALMADEN RESEARCH CENTER   (United States)

^b IBM   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CALIBRATION; ELECTROMAGNETIC WAVE REFLECTION; ELECTRON SPECTROSCOPY; ELLIPSOMETRY; FLUORINE CONTAINING POLYMERS; LUBRICANTS; PLASTIC FILMS; POLYETHERS; REFRACTIVE INDEX; SILICON; THICKNESS MEASUREMENT; X RAY SPECTROGRAPHS;

ELECTRON SPECTROSCOPY FOR CHEMICAL ANALYSIS (ESCA); X RAY REFLECTIVITY (XRR);

MAGNETIC DISK STORAGE;

EID: 0032117981     PISSN: 00189464     EISSN: None     Source Type: Journal    
DOI: 10.1109/20.706702     Document Type: Article

References (12)

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