BCN coatings by RF PACVD at low temperature

Surface and Coatings Technology

Volumn 174-175, Issue , 2003, Pages 1225-1228

  Ahn, H ^a   Klimek, K S ^a   Rie, K T ^a  

^a TECHNICAL UNIVERSITY OF BRAUNSCHWEIG   (Germany)

Author keywords

(N Pyrrolidino)diethylborane (PEB); BCN; N,N ,N Trimethylborazine (TMB); Radio frequency plasma assisted chemical vapour deposition (RF PACVD)

Indexed keywords

ION BOMBARDMENT; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; POLYCARBONATES; REFRACTIVE INDEX; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SILICON WAFERS;

ELASTIC RECOIL DETECTION ANALYSIS (ERDA);

ORGANIC COATINGS;

COATING; INDUSTRIAL APPLICATION; PLASMA; SURFACE PROPERTY;

EID: 0042327892     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(03)00403-1     Document Type: Article

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