SCOPUS 정보 검색 플랫폼

Applied Physics Letters

Volumn 81, Issue 6, 2002, Pages 1113-1115

Ultrathin CNx overcoats for 1Tb/in.2 hard disk drive systems

(4) Li, D J a,b Guruz, Murat U c Bhatia, C Singh c Chung, Yip Wah a

a Northwestern University (United States)

b TIANJIN NORMAL UNIVERSITY (China)

c IBM (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPES; CARBON NITRIDE FILMS; CORROSION DAMAGE; CORROSION PERFORMANCE; DEPOSITION SYSTEMS; HARD DISK DRIVE; HARD DISK SUBSTRATE; PULSED DC MAGNETRON SPUTTERING; SUBSTRATE BIAS; SUBSTRATE ROTATION; SUBSTRATE TILTS; SURFACE NORMALS; TILT ANGLE; TWO-FOLD REDUCTION; ULTRA-THIN;

ATOMIC FORCE MICROSCOPY; CARBON FILMS; CORROSION; FILM GROWTH; FILM PREPARATION; HARD DISK STORAGE; NITRIDES; ROTATION; SURFACE ROUGHNESS; ULTRATHIN FILMS;

SUBSTRATES;

EID: 79958241543 PISSN: 00036951 EISSN: None Source Type: Journal
DOI: 10.1063/1.1498866 Document Type: Article

Times cited : (37)

References (11)

1
- 0000045912
- jva JVTAD6 0734-2101
- W. C. Chan, B. Zhou, Y. W. Chung, C. S. Lee, and S. T. Lee, J. Vac. Sci. Technol. A 16, 1907 (1998). jva JVTAD6 0734-2101
- (1998) J. Vac. Sci. Technol. A , vol.16 , pp. 1907
- Chan, W.C.¹ Zhou, B.² Chung, Y.W.³ Lee, C.S.⁴ Lee, S.T.⁵

2
- 0027628625
- trt TRTRE4 1040-2004
- M. Y. Chen, X. Lin, V. P. Dravid, Y. W. Chung, M. S. Wong, and W. D. Sproul, Tribol. Trans. 36, 491 (1993). trt TRTRE4 1040-2004
- (1993) Tribol. Trans. , vol.36 , pp. 491
- Chen, M.Y.¹ Lin, X.² Dravid, V.P.³ Chung, Y.W.⁴ Wong, M.S.⁵ Sproul, W.D.⁶

3
- 0029809623
- jti JOTRE9 0742-4787
- C. Cutiongco, D. Li, Y. W. Chung, and C. S. Bhatia, ASME J. Tribol. 118, 543 (1996). jti JOTRE9 0742-4787
- (1996) ASME J. Tribol. , vol.118 , pp. 543
- Cutiongco, C.¹ Li, D.² Chung, Y.W.³ Bhatia, C.S.⁴

4
- 0030500821
- jva JVTAD6 0734-2101
- A. Khurshudov, K. Kato, and S. Daisuke, J. Vac. Sci. Technol. A 14, 2935 (1996). jva JVTAD6 0734-2101
- (1996) J. Vac. Sci. Technol. A , vol.14 , pp. 2935
- Khurshudov, A.¹ Kato, K.² Daisuke, S.³

5
- 0000720680
- jaJAPIAU 0021-8979
- T. W. Scharf, R. D. Ott, D. Yang, and J. A. Barnard, J. Appl. Phys. 85, 3142 (1999). jap JAPIAU 0021-8979
- (1999) J. Appl. Phys. , vol.85 , pp. 3142
- Scharf, T.W.¹ Ott, R.D.² Yang, D.³ Barnard, J.A.⁴

6
- 0035152318
- tsf THSFAP 0040-6090
- M. U. Guruz, V. P. Dravid, Y. W. Chung, M. M. Lacerda, C. S. Bhatia, Y. H. Yu, and S. C. Lee, Thin Solid Films 381, 6 (2001). tsf THSFAP 0040-6090
- (2001) Thin Solid Films , vol.381 , pp. 6
- Guruz, M.U.¹ Dravid, V.P.² Chung, Y.W.³ Lacerda, M.M.⁴ Bhatia, C.S.⁵ Yu, Y.H.⁶ Lee, S.C.⁷

7
- 0031547708
- nib NIMBEU 0168-583X
- W. Ensinger, Nucl. Instrum. Methods Phys. Res. B 127/128, 796 (1997). nib NIMBEU 0168-583X
- (1997) Nucl. Instrum. Methods Phys. Res. B , vol.127-128 , pp. 796
- Ensinger, W.¹

8
- 84957228669
- jva JVTAD6 0734-2101
- L. Hultman, W. D. Münz, J. Musil, S. Kadlec, I. Petrov, and J. E. Greene, J. Vac. Sci. Technol. A 9, 434 (1991). jva JVTAD6 0734-2101
- (1991) J. Vac. Sci. Technol. A , vol.9 , pp. 434
- Hultman, L.¹ Münz, W.D.² Musil, J.³ Kadlec, S.⁴ Petrov, I.⁵ Greene, J.E.⁶

9
- 0001527594
- jaJAPIAU 0021-8979
- A. S. Kao and G. L. Gorman, J. Appl. Phys. 67, 3826 (1990). jap JAPIAU 0021-8979
- (1990) J. Appl. Phys. , vol.67 , pp. 3826
- Kao, A.S.¹ Gorman, G.L.²

10
- 0024140084
- jes JESOAN 0013-4651
- V. Novotny and N. Staud, J. Electrochem. Soc. 135, 2931 (1988). jes JESOAN 0013-4651
- (1988) J. Electrochem. Soc. , vol.135 , pp. 2931
- Novotny, V.¹ Staud, N.²

11
- 0034225150
- jva JVTAD6 0734-2101
- J. F. Ying and T. Anoikin, J. Vac. Sci. Technol. A 18, 1804 (2000). jva JVTAD6 0734-2101
- (2000) J. Vac. Sci. Technol. A , vol.18 , pp. 1804
- Ying, J.F.¹ Anoikin, T.²

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.