Mechanical properties of B-C-N films synthesized by an electron beam excited plasma-CVD method

Surface and Coatings Technology

Volumn 169-170, Issue , 2003, Pages 270-273

  Hasegawa, Takeshi ^a   Yamamoto, Kazuhiro ^b   Kakudate, Yozo ^b   Ban, Masahito ^a,c  

^a JAPAN FINE CERAMICS CENTER   (Japan)

^b NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

^c KAWASAKI HEAVY INDUSTRIES LTD   (Japan)

Author keywords

B C N films; Friction coefficient; Hardness; Plasma CVD; Wear rate

Indexed keywords

BORON COMPOUNDS; CHEMICAL VAPOR DEPOSITION; FRICTION; LUBRICATION; SYNTHESIS (CHEMICAL); TRIBOLOGY; WEAR OF MATERIALS;

TRIBOLOGICAL PROPERTIES;

METALLIC FILMS;

COATING; FILM; MECHANICAL PROPERTY; PLASMA TREATMENT; SURFACE TREATMENT; VAPOR DEPOSITION;

EID: 0038807572     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(03)00039-2     Document Type: Article

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