Corrosion behavior of boron-carbon-nitride films grown by magnetron sputtering

Thin Solid Films

Volumn 447-448, Issue , 2004, Pages 197-200

  Byon, Eungsun ^a   Son, Myungsook ^b   Hara, Nobuyoshi ^c   Sugimoto, Katsuhisa ^c  

^a Korea Institute of Machine and Materials   (South Korea)

^b NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

^c TOHOKU UNIVERSITY   (Japan)

Author keywords

Boron carbon nitride films; Composition effect; Corrosion behaviour; Magnetron sputtering; PH of the solution

Indexed keywords

ALKALINITY; BORON COMPOUNDS; CARBON; COMPOSITION EFFECTS; CORROSION RESISTANCE; ELLIPSOMETRY; MAGNETRON SPUTTERING; MATHEMATICAL MODELS; PH EFFECTS; PLATINUM; SOLUTIONS; TERNARY SYSTEMS;

ALKALINE SOLUTIONS;

THIN FILMS;

EID: 1342302478     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(03)01056-3     Document Type: Conference Paper

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