Built-in self-test of MEMS accelerometers

Journal of Microelectromechanical Systems

Volumn 15, Issue 1, 2006, Pages 52-68

  Deb, Nilmoni ^a   Blanton, R D ^a  

^a CARNEGIE MELLON UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACCELEROMETERS; BUILT-IN SELF TEST; COMPUTER SIMULATION; ETCHING; INTEGRATED CIRCUIT LAYOUT; MATHEMATICAL MODELS; SEMICONDUCTOR DEVICE MANUFACTURE;

LAYOUT ASSYMETRY; SELF-TEST OUTPUTS; SYMMETRIC MICROSYSTEMS;

MICROELECTROMECHANICAL DEVICES;

EID: 32244432178     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2006.864239     Document Type: Article

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