Schematic-based lumped parameterized behavioral modeling for suspended MEMS

IEEE/ACM International Conference on Computer-Aided Design, Digest of Technical Papers

Volumn , Issue , 2002, Pages 367-373

  Jing, Qi ^a   Mukherjee, Tamal ^a   Fedder, Gary K ^a,b  

^a CARNEGIE MELLON UNIVERSITY   (United States)

^b CARNEGIE MELLON UNIVERSITY   (United States)

Author keywords

Behavioral; Electrostatic gap; Lumped; MEMS; Nonlinear beam; Parameterized; Schematic based

Indexed keywords

ANALOG HARDWARE DESCRIPTION LANGUAGES; BEHAVIORAL MODEL; ELECTROSTATIC GAP; NONLINEAR BEAM;

BANDPASS FILTERS; BOUNDARY ELEMENT METHOD; CMOS INTEGRATED CIRCUITS; COMPUTER AIDED SOFTWARE ENGINEERING; COMPUTER HARDWARE DESCRIPTION LANGUAGES; COMPUTER SIMULATION; ELECTRIC NETWORK TOPOLOGY; ELECTROSTATICS; FINITE ELEMENT METHOD; ITERATIVE METHODS; MATHEMATICAL MODELS; SCHEMATIC DIAGRAMS;

MICROELECTROMECHANICAL DEVICES;

EID: 0036911926     PISSN: 10923152     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1145/774572.774627     Document Type: Conference Paper

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