Temperature stabilization of CMOS capacitive accelerometers

Journal of Micromechanics and Microengineering

Volumn 14, Issue 4, 2004, Pages 559-566

  Lakdawala, Hasnain ^a,c   Fedder, Gary K ^a,b  

^a CARNEGIE MELLON UNIVERSITY   (United States)

^b CARNEGIE MELLON UNIVERSITY   (United States)

^c IC Mechanics   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BENDING (DEFORMATION); CAPACITANCE; CMOS INTEGRATED CIRCUITS; GEOMETRY; MICROMACHINING; POLYSILICON; RESIDUAL STRESSES; SENSITIVITY ANALYSIS; SENSORS; SUBSTRATES; THERMAL EFFECTS;

FINE-LINE GEOMETRY; MASK MISALIGNMENTS; MICROMACHINED SENSORS; TEMPERATURE STABILIZATION;

ACCELEROMETERS;

EID: 2342592658     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/14/4/017     Document Type: Article

References (19)

1. Luo H, Zhang G, Carley L R and Fedder G K 2002 A post-CMOS micromachined lateral accelerometer IEEE/ASME J. Microelectromech. Syst. 11188-95
2. Xie H and Fedder G K 2002 Vertical comb-finger capacitive actuation and sensing for CMOS-MEMS Sensors Actuators A 95 212-21
3. Luo H, Fedder G K and Carley L R 2000 An elastically gimbaled Z-axis CMOS-MEMS gyroscopein Int. Symp. on Smart Structures and Microsystems 2000 (Hong Kong, 19-21 Oct.)
4. Iyer S, Lakdawala H, Fedder G K and Mukherjee T 2000 Macromodeling temperature-dependent curl in cmos micromachined beams 4th Int. Conf. on Modeling and Simulation of Microsystems (Hilton Head Island, South Carolina, 19-21 March)
5. LM199/LM299/LM399/LM3999 precision voltage reference integrated circuit. Available from National Semiconductor, http://www.national.com
6. White R M and Goyal R C 1972 Stabilizing surface-wave devices against temperature variations Electron. Lett. 8 142-3
7. Ruby R and Merchant P 1994 Micromachined thin film bulk acoustic resonators Proc. 1994 IEEE Int. Frequency Control (Boston, MA)
8. Nguyen C T C 1995 Micromechanical resonators for oscillators and filters Proc. 1995 IEEE Int. Frequency Control (Seattle, WA)
9. Mastrangelo C H 1991 Thermal applications of microbridges PhD Thesis EECS, U. C. Berkeley
10. Baltes H, Paul O and Brand O 1998 Micromachined thermally based CMOS microsensors Proc. IEEE 86 1660-78
11. Fedder G K, Santhanam S, Reed M L, Eagle S C, Guillou D F, Lu M S-C and Carley L R 1996 Laminated high-aspect-ratio microstructures in a conventional CMOS process Sensors Actuators A 57 103-10
12. Zhu X 2002 Post-CMOS micromachining of surface and bulk structures PhD Thesis Department of Electrical and Computer Engineering, Carnegie Mellon University, Pittsburgh, PA
13. Tang W C, Nguyen T-C H and Howe R T 1989 Laterally driven polysilicon resonant microstructures Sensors Actuators 20 25-32
14. Lakdawala H and Fedder G K 1999 Analysis of temperature-dependent residual stress gradients in CMOS micromachined structures Proc. IEEE Int. Conf. on Solid-State Sensors and Actuators (Transducers '99) (Sendai, Japan, 7-10 June 1999) vol 1 pp 526-9
15. Lakdawala H 2002 Temperature control of CMOS micromachined sensors PhD Thesis Department of Electrical and Computer Engineering, Carnegie Mellon University, Pittsburgh PA, April 2002
16. Ehmann M, Ruther P, von Arx M, Baltes H and Paul O 2001 Ageing behavior of polysilicon heaters for CMOS microstructures operated at temperatures up to 1200 K MEMS '01 Interlaken (Switzerland, 21-25 Jan)
17. Lakdawala H and Fedder G K 2001 CMOS micromachined infrared imager pixel Technical Digest of the IEEE Int. Conf. on Solid-State Sensors and Actuators (Munich, Germany, 10-14 June 2001) pp 1548-51
18. Von Arx M, Paul O and Baltes H 1995 Determination of the heat capacity of CMOS layers for optimal CMOS sensor design Sensors Actuators A 46/47 428-31
19. IMSL C library, http://www.vni.com/products/imsl/