Failure modes for stiction in surface-micromachined MEMS

IEEE International Test Conference (TC)

Volumn , Issue , 1998, Pages 551-556

  Kolpekwar, Abhijeet ^a   Blanton, R D ^a   Woodilla, David ^a  

^a CARNEGIE MELLON UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACCELEROMETERS; FAILURE ANALYSIS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; STICTION;

SURFACE-MICROMACHINED SENSORS;

MICROSENSORS;

EID: 0032306082     PISSN: 10893539     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)