High-level fault modeling in surface-micromachined MEMS

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4019, Issue , 2000, Pages 228-235

  Deb, N ^a   Blanton, R D ^a  

^a CARNEGIE MELLON UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANTI-ALIASING; COMPUTER SIMULATION; FAULT TOLERANT COMPUTER SYSTEMS; FINITE ELEMENT METHOD; MATHEMATICAL MODELS; MICROMACHINING; RESPONSE TIME (COMPUTER SYSTEMS);

HIGH-LEVEL FAULT MODELING; SCHEMATIC-LEVEL FAULT SIMULATIONS;

MICROELECTROMECHANICAL DEVICES;

EID: 0033719146     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (13)