Combined piezoresistive/capacitive pressure sensor with self-test function based on thermal actuation

International Conference on Solid-State Sensors and Actuators, Proceedings

Volumn 2, Issue , 1997, Pages 1461-1464

  De Bruyker, Dirk ^a   Cozma, Adriana ^a   Puers, Robert ^a  

^a UNIVERSITY OF LEUVEN   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; CAPACITORS; DIAPHRAGMS; GLASS; PRESSURE; PRESSURE TRANSDUCERS; SILICON WAFERS; STRESSES;

CAPACITIVE PRESSURE SENSOR; PIEZORESISTIVE PRESSURE SENSOR; PIEZORESISTORS; SELF TEST FUNCTION; THERMAL ACTUATION;

SENSORS;

EID: 0030646869     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)