A low-noise low-offset chopper-stabilized capacitive-readout amplifier for CMOS MEMS accelerometers

Digest of Technical Papers - IEEE International Solid-State Circuits Conference

Volumn , Issue , 2002, Pages 428-429+478+425

  Wu, Jiangfeng ^a   Fedder, Gary K ^a   Carley, L Richard ^a  

^a CARNEGIE MELLON UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACCELEROMETERS; BANDWIDTH; CAPACITANCE; CMOS INTEGRATED CIRCUITS; COMPUTER SIMULATION; ELECTROSTATIC ACTUATORS; FEEDBACK AMPLIFIERS; GAIN MEASUREMENT; LEAKAGE CURRENTS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; MOSFET DEVICES; SIGNAL TO NOISE RATIO; THERMAL NOISE;

CAPACITANCE MATCHING;

CHOPPER AMPLIFIERS;

EID: 0036114028     PISSN: 01936530     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (4)

1. A lateral capacitive CMOS accelerometer with structural curl compensation
2. A three-axis micromachined accelerometer with a CMOS position-sense interface and digital offset-trim electronics
3. An interface IC for a capacitive silicon ug accelerometer
4. Circuit techniques for reducing the effects of op-amp imperfections: Autozeroing, correlated double sampling, and chopper stabilization