Performance of MEMS inertial sensors

Record - IEEE PLANS, Position Location and Navigation Symposium

Volumn , Issue , 1998, Pages 1-8

  Kourepenis, A ^a   Borenstein, J ^a   Connelly, J ^a   Elliott, R ^a   Ward, P ^a   Weinberg, M ^a  

^a CHARLES STARK DRAPER LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACCELEROMETERS; ELECTRONIC EQUIPMENT MANUFACTURE; GYROSCOPES; INSTRUMENT TESTING; MICROELECTROMECHANICAL DEVICES; SILICON WAFERS;

MICROELECTROMECHANICAL INERTIAL SENSORS;

SENSORS;

EID: 0031700431     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)