Multi-modal built-in self-test for symmetric microsystems

Proceedings of the IEEE VLSI Test Symposium

Volumn , Issue , 2004, Pages 139-147

  Deb, Nilmoni ^a   Blanton, R D ^a  

^a CARNEGIE MELLON UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACCELEROMETER SENSORS; ETCH VARIATIONS; MICROSYSTEMS; THIN FILM TECHNOLOGY;

ACCELEROMETERS; BUILT-IN SELF TEST; CMOS INTEGRATED CIRCUITS; DEFECTS; ELECTRIC POTENTIAL; ETCHING; MATHEMATICAL MODELS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; MODULATION; MOS CAPACITORS; SEMICONDUCTOR DEVICE MANUFACTURE;

MICROSTRUCTURE;

EID: 3142751390     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/VTEST.2004.1299237     Document Type: Conference Paper

References (24)

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