Electrically induced stimuli for MEMS self-test

Proceedings of the IEEE VLSI Test Symposium

Volumn , Issue , 2001, Pages 210-215

  Charlot, B ^a   Mir, S ^a   Parrain, F ^a   Courtois, B ^a  

^a TIMA LABORATORY   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ACCELEROMETERS; BUILT-IN SELF TEST; EMBEDDED SYSTEMS; IMAGE SENSORS; INFRARED IMAGING; MICROELECTROMECHANICAL DEVICES; PIEZOELECTRIC DEVICES;

ELECTRICALLY INDUCED STIMULLI; INFRARED IMAGER; INFRARED SENSOR; PIEZORESISTIVE SENSOR;

INTEGRATED CIRCUIT TESTING;

EID: 0034995118     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)

1. On the integration of design and test for chips embedding MEMS
2. Test support strategies for MEMS
3. Failure modes in surface micromachining MEMS
4. High level fault modeling in surface micromachined MEMS
5. Fault modeling of suspended thermal MEMS
6. Failure mechanisms and fault classes for CMOS-compatible microelectromechanical systems
7. Accelerometer systems with self-testable features
8. Airbag application: A microsystem including a silicon capacitive accelerometer, CMOS switched capacitor electronics and true self-test capability
9. A new concept for a self-testable pressure sensor based on the bimetal effect