Atomic layer deposition of TiO2 and Al2O3 thin films and nanolaminates

Smart Materials and Structures

Volumn 15, Issue 1, 2006, Pages

  Mitchell, D R G ^a   Triani, G ^a   Attard, D J ^a   Finnie, K S ^a   Evans, P J ^a   Barbe C J ^a   Bartlett, J R ^a  

^a AUSTRALIAN NUCLEAR SCIENCE AND TECHNOLOGY ORGANISATION   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

DEPOSITION; LAMINATES; MULTILAYERS; NANOSTRUCTURED MATERIALS; TITANIUM DIOXIDE;

CRYSTALLIZATION SEQUENCE; MULTILAYER STACKS;

THIN FILMS;

EID: 31344441531     PISSN: 09641726     EISSN: 1361665X     Source Type: Journal    
DOI: 10.1088/0964-1726/15/1/010     Document Type: Conference Paper

References (25)

1. Suntola T and Anstson J 1975 US Patent Specification 405430
2. Ritala M and Leskelä M 1999 Nanotechnology 10 19-24
3. Ritala M, Kukli K, Rahtu A, Räisänen P, Leskelä M, Sajavaara T and Keinonen J 2000 Science 288 319-21
4. Kukli K, Ritala M and Leskelä M 2000 Chem. Mater. 12 1914-20
5. Hausmann D M, de Rouffignac P, Smith A, Gordon R and Monsma D 2003 Thin Solid Films 443 1-4
6. Renault O, Samour D, Rouchon D, Holliger P, Papon A M, Blin D and Marthon S 2003 Thin Solid Films 428 190-4
7. Ott A W, Klaus J W, Johnson J M and George S M 1997 Thin Solid Films 292 135-44
8. Sneh O, Clark-Phelps R B, Londergan A R, Winkler J and Seidel T E 2002 Thin Solid Films 402 248-61
9. Kukli K, Ritala M and Leskelä M 1999 J. Appl. Phys. 86 5656-62
10. Zaitsu S, Jitsuno T, Nakatsuka M, Yamanaka T and Motokoshi S 2002 Appl. Phys. Lett. 80 2442-4
11. Zaitsu S, Motokoshi S, Jitsuno T, Nakatsuka M and Yamanaka T 2002 Japan. J. Appl. Phys. 41 160-5
12. Riihelä D, Ritala M, Matero R and Leskelä M 1996 Thin Solid Films 289 250-5
13. Kern W and Puotinen D A 1970 RCA Rev. 31 187-9
14. Mitchell D R G, Attard D J and Triani G 2003 Thin Solid Films 441 85-95
15. Aarik J, Aidla A, Kikas A, Käämbre T, Rammula R, Ritslaid P, Uustare T and Sammelselg V 2004 Appl. Surf. Sci. 230 292-300
16. Kukli K, Ritala M, Sajavaara T, Keinonen J and Leskelä M 2002 Thin Solid Films 416 72-9
17. Aarik J, Karlis J, Mändar H, Uustare T and Sammelselg V 2001 Appl. Surf. Sci. 181 339-48
18. Aarik J, Aidla A, Sammelselg V and Uustare T 1997 J. Cryst. Growth 181 259-64
19. Exarhos G J, Hess N J and Wood S 1992 Proc. SPIE-Int. Opt. Eng. 1624 444-56
20. Aarik J, Aidla A, Mändar H and Uustare T 2001 Appl. Surf. Sci. 172 148-58
21. Junghanns T and Hofmeister H 1993 Mater. Sci. Forum 113/115 637-42
22. Hausmann D M and Gordon R G 2003 J. Cryst. Growth 249 251-61
23. Aarik J, Aidla A, Kiisler A-A, Uustare T and Sammelselg V 1997 Thin Solid Films 305 270-3
24. Drozd V E, Baraban A P and Nikiforova I O 1994 Appl. Surf. Sci. 82/83 583-6
25. Mitchell D R G, Attard D J and Triani G 2005 J. Cryst. Growth at press