Effect of growth conditions on formation of TiO2-II thin films in atomic layer deposition process

Journal of Crystal Growth

Volumn 181, Issue 3, 1997, Pages 259-264

  Aarik, Jaan ^a   Aidla, Aleks ^a   Sammelselg, Väino ^b   Uustare, Teet ^a  

^a UNIVERSITY OF TARTU   (Estonia)

^b ESTONIAN ACADEMY OF SCIENCES   (Estonia)

Author keywords

[No Author keywords available]

Indexed keywords

DEPOSITION; FILM GROWTH; SURFACE PHENOMENA; THIN FILMS; TITANIUM DIOXIDE;

ATOMIC LAYER DEPOSITION; POLYMORPHS;

CRYSTAL GROWTH;

EID: 0031273756     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-0248(97)00279-0     Document Type: Article

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