Duo-mold imprinting of three-dimensional polymeric structures

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 22, Issue 6, 2004, Pages 3251-3256

  Kong, Y P ^a   Low, H Y ^a   Pang, S W ^b   Yee, A F ^c  

^a INSTITUTE OF MATERIALS RESEARCH AND ENGINEERING   (Singapore)

^b UNIVERSITY OF MICHIGAN   (United States)

^c University of California   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DUO-MOLD IMPRINTINGS; FILM THICKNESS; PLANARIZED THIN FILMS; POLYMERIC STRUCTURES;

CONTACT ANGLE; DIFFRACTION GRATINGS; INTERFACIAL ENERGY; MOLDING; MOLECULAR WEIGHT; NANOSTRUCTURED MATERIALS; PHOTOLITHOGRAPHY; POLYMETHYL METHACRYLATES; PRESSURE EFFECTS; SILANES; SILICON; SPIN COATING; SURFACE TREATMENT; THERMAL EFFECTS; THIN FILMS;

ORGANIC POLYMERS;

EID: 13244252647     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1813459     Document Type: Conference Paper

References (15)

1. G. Kiriakidis and N. Katsarakis, Mater. Phys. Mech. 1, 20 (2000).
2. O. Tabata, N. Matsuzuka, T. Yamaji, S. Uemura, and K. Yamomoto, IEEE Proc. 180 (2002).
3. F. Romanato et al., Microelectron. Eng. 67, 479 (2003).
4. S. T. Brittain, O. J. A. Schueller, H. Wu, S. Whitesides, and G. M. Whitesides, J. Phys. Chem. B 105, 347 (2001).
5. M. Tormnen, Microelectron. Eng. 73-74, 535 (2004).
6. X. Sun, L. Zhuang, W. Zhang, and S. Y. Chou, J. Vac. Sci. Technol. B 16, 3922 (1998).
7. T. Borzenko, M. Tormen, G. Schmidt, and L. W. Molenkamp, Appl. Phys. Lett. 79, 2246 (2001).
8. X. D. Huang, L.-R. Bao, X. Cheng, L. J. Guo, S. W. Pang, and A. F. Yee, J. Vac. Sci. Technol. B 20, 2872 (2002).
9. L. R. Bao, X. Cheng, X. D. Huang, L. J. Guo, S. W. Pang, and A. F. Yee, J. Vac. Sci. Technol. B 20, 2881 (2002).
10. L. Tan, Y. P. Kong, L. R. Bao, X. D. Huang, S. W. Pang, and A. F. Yee, J. Vac. Sci. Technol. B 21, 2743 (2003).
11. D. K. Owens and R. C. Wendt, J. Appl. Polym. Sci. 13, 1741 (1969).
12. B. H. Cumpston, Nature (London) 398, 51 (1999).
13. C. M. Sotomayor Torres, Mater. Sci. Eng., C 23, 23 (2003).
14. N. Li, W. Wu, and S. Y. Chou, Proceedings of the 48th International Conference on Electron Ion and Photon Beam Technology and Nanofabrication (2004).
15. A. Fuchs, B. Vratzov, T. Wahlbrink, Y. Georgiev, and H. Kurz, Proceedings of the 48th International Conference on Electron Ion and Photon Beam Technology and Nanofabrication (2004).