Production of movable metallic microstructures by aligned hot embossing and reactive ion etching

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3680, Issue II, 1999, Pages 1038-1045

  Roetting, Oliver ^a   Koehler, Bernd ^a   Reuther, Frank ^a   Blum, Hartmut ^a   Bacher, Walter ^a  

^a Jenoptik Mikrotechnik   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ACCELEROMETERS; COMPUTER SOFTWARE; IMAGE PROCESSING; PLASTICS MOLDING; POLYMETHYL METHACRYLATES; REACTIVE ION ETCHING; SENSORS; SUBSTRATES;

ALIGNED HOT EMBOSSING;

METALLOGRAPHIC MICROSTRUCTURE;

EID: 0032637537     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.341173     Document Type: Conference Paper

References (0)