Characterization of silicate/Si(001) interfaces

Applied Physics Letters

Volumn 81, Issue 22, 2002, Pages 4227-4229

  Copel, M ^a   Cartier, E ^a   Narayanan, V ^a   Reuter, M C ^a   Guha, S ^a   Bojarczuk, N ^a  

^a IBM T J WATSON RESEARCH CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; ELECTRIC CHARGE; ELECTRIC POTENTIAL; HIGH TEMPERATURE EFFECTS; INTERFACES (MATERIALS); IONS; MICROELECTRONICS; PASSIVATION; PERMITTIVITY; SCATTERING;

GATE DIELECTRICS;

SILICATES;

EID: 0037175909     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1524296     Document Type: Article

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