Silicon nano-transistors for logic applications

Physica E: Low-Dimensional Systems and Nanostructures

Volumn 19, Issue 1-2, 2003, Pages 1-5

  Chau, Robert ^a   Boyanov, Boyan ^a   Doyle, Brian ^a   Doczy, Mark ^a   Datta, Suman ^a   Hareland, Scott ^a   Jin, Ben ^a   Kavalieros, Jack ^a   Metz, Matthew ^a  

^a INTEL CORPORATION   (United States)

Author keywords

Nano technology integrated circuits; Transistors field effect

Indexed keywords

CMOS INTEGRATED CIRCUITS; LOGIC DEVICES; SEMICONDUCTING SILICON; TRANSISTORS;

MINIATURIZATION;

NANOTECHNOLOGY;

EID: 0042009674     PISSN: 13869477     EISSN: None     Source Type: Journal    
DOI: 10.1016/S1386-9477(03)00284-4     Document Type: Conference Paper

References (10)

1. R. Chau, et al., Nikkei Microdevices, February 2002, pp. 83-88.
2. R. Chau, Silicon Nanoelectronics Workshop, Kyoto, Japan, 2001, pp. 2-3.
3. Doyle B.et al. Intel Tech. J. 6(2):2002.
4. R. Chau, et al., IEDM (2000) 45-48.
5. D. Barlage, et al., IEDM (2001) 231-234.
6. R. Chau, et al., IEDM (2001) 621-624.
7. R. Chau, et al., International Conference on Solid State Devices & Materials, Nagoya, Japan, 2002, pp. 68-69.
8. Lindert N.et al. IEEE Elec. Dev. Lett. 22:2001;487-489.
9. Huang, Duan, Lieber, et al., Science 294 (2001) 1313.
10. R. Martel, et al., IEDM (2001) 159-162.