Electrostatic actuation without electrolysis in microfluidic MEMS

TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers

Volumn 1, Issue , 2003, Pages 615-618

  Sounart, T L ^a   Michalske, T A ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

Conductivity measurement; Delay; Electrochemical processes; Electrodes; Electrostatic actuators; Liquids; Microfluidics; Micromachining; Micromechanical devices; Polarization

Indexed keywords

AC MOTORS; ACTUATORS; COMPOSITE MICROMECHANICS; DIELECTRIC LIQUIDS; ELECTROCHEMICAL ELECTRODES; ELECTROCHEMISTRY; ELECTRODES; ELECTROLYSIS; ELECTROSTATIC DEVICES; ELECTROSTATICS; FREQUENCY RESPONSE; IONIC STRENGTH; LIQUIDS; MICROFLUIDICS; MICROMACHINING; MICROSYSTEMS; POLARIZATION; SOLID-STATE SENSORS; TRANSDUCERS;

CONDUCTIVITY MEASUREMENTS; DELAY; DIELECTRIC PERMITTIVITIES; ELECTROCHEMICAL PROCESS; ELECTRODE POLARIZATIONS; ELECTROSTATIC ACTUATION; MICROMACHINING PROCESS; MICROMECHANICAL DEVICE;

ELECTROSTATIC ACTUATORS;

EID: 84944743265     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2003.1215548     Document Type: Conference Paper

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