Micro capillary-force driven fluidic accumulator/pressure source

TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers

Volumn 1, Issue , 2003, Pages 155-158

  Hobbs, E D ^a,c   Pisano, A P ^a,b,c  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b UNIVERSITY OF CALIFORNIA   (United States)

^c UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

Actuators; Batteries; Biosensors; Fluidic microsystems; Microfluidics; Micromechanical devices; Poles and towers; Pumps; Sensor systems; Voltage

Indexed keywords

ACTUATORS; BIOASSAY; BIOSENSORS; ELECTRIC POTENTIAL; MICROFLUIDICS; MICROSYSTEMS; PUMPS; SOLAR CELLS; TRANSDUCERS;

FLUIDIC MICROSYSTEMS; FLUIDIC RESISTANCES; MICRO-FLUIDIC DEVICES; MICROMECHANICAL DEVICE; POLES AND TOWERS; SENSOR SYSTEMS; SURFACE TENSION FORCE; WAFER LEVEL PROCESS;

SOLID-STATE SENSORS;

EID: 33847399364     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2003.1215276     Document Type: Conference Paper

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