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Applied Surface Science

Volumn 252, Issue 1 SPEC. ISS., 2005, Pages 3-10

Depth profile and interface analysis in the nm-range

(5) Oswald, S a Reiche, R a Zier, M a Baunack, S a Wetzig, K a

a IFW DRESDEN (Germany)

Author keywords

Angle dependent analysis; Barrier layers; Depth profiling; Electron spectroscopy; Surface morphology; Thin films

Indexed keywords

ELECTRON SPECTROSCOPY; MATHEMATICAL MODELS; NANOTECHNOLOGY; SPUTTERING; SURFACE PHENOMENA; THICKNESS MEASUREMENT; X RAY PHOTOELECTRON SPECTROSCOPY;

ANGLE-DEPENDENT ANALYSIS; BARRIER LAYERS; COMPLEX LAYER STRUCTURE; DEPTH PROFILING;

THIN FILMS;

EID: 24644488338 PISSN: 01694332 EISSN: None Source Type: Journal
DOI: 10.1016/j.apsusc.2005.01.102 Document Type: Conference Paper

Times cited : (30)

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