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Volumn 26, Issue 6, 1998, Pages 471-479
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Depth distribution and bonding states of phosphorus implanted in titanium investigated by AES, XPS and SIMS
a
a
IFW DRESDEN
(Germany)
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Author keywords
[No Author keywords available]
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Indexed keywords
AUGER ELECTRON SPECTROSCOPY;
DOSIMETRY;
HEAT TREATMENT;
ION IMPLANTATION;
OXYGEN;
SECONDARY ION MASS SPECTROMETRY;
TITANIUM;
X RAY PHOTOELECTRON SPECTROSCOPY;
DEPTH PROFILING;
FACTOR ANALYSIS;
PHOSPHORUS;
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EID: 0032072552
PISSN: 01422421
EISSN: None
Source Type: Journal
DOI: 10.1002/(SICI)1096-9918(19980515)26:6<471::AID-SIA391>3.0.CO;2-S Document Type: Article |
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Times cited : (64)
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References (27)
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