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Volumn 69, Issue 4-6, 2002, Pages 125-163

Thin films and interfaces in microelectronics: Composition and chemistry as function of depth

(2) Opila, Robert L a,b Eng Jr , Joseph a

b UNIVERSITY OF DELAWARE (United States)

Author keywords

Agglomeration; Angle resolved X ray photoemission; Composition profile; Depth profile; Diffusion; Diffusion barrier layers; Extended X ray absorption fine structure spectroscopy; Gate dielectric; Interface traps; Maximum entropy method; Metal polymer interfaces; Ostwald ripening; Self assembled monolayers; Vibrational spectroscopy; X ray absorption spectroscopy; X ray photoemission spectroscopy

Indexed keywords

CMOS INTEGRATED CIRCUITS; DIELECTRIC MATERIALS; DIFFUSION; DYNAMIC RANDOM ACCESS STORAGE; INTERFACES (COMPUTER); PERMITTIVITY; PHOTOEMISSION; SELF ASSEMBLY; THIN FILMS; X RAY PHOTOELECTRON SPECTROSCOPY;

GATE DIELECTRICS; MICROELECTRONIC DEVICES;

MICROELECTRONICS;

EID: 0036131799 PISSN: 00796816 EISSN: None Source Type: Journal
DOI: 10.1016/S0079-6816(01)00049-1 Document Type: Review

Times cited : (88)

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