SCOPUS 정보 검색 플랫폼

Surface and Coatings Technology

Volumn 97, Issue 1-3, 1997, Pages 131-139

Ion bombardment diagnostics in a nitrogen RF magnetron sputtering discharge

(3) Kaltofen, R a Sebald, T a Weise, G a

a IFW DRESDEN (Germany)

Author keywords

Carbon nitride; Energy resolved mass spectrometry; Ion bombardment diagnosis; Nitrogen plasma; RF magnetron sputtering

Indexed keywords

CARBON INORGANIC COMPOUNDS; DEPOSITION; FILM GROWTH; MAGNETRON SPUTTERING; MASS SPECTROMETRY; NITRIDES; NITROGEN; PLASMA DIAGNOSTICS; PLASMA SHEATHS; SUBSTRATES;

CARBON NITRIDE; ION KINETIC ENERGY DISTRIBUTION;

ION BOMBARDMENT;

EID: 0031369872 PISSN: 02578972 EISSN: None Source Type: Journal
DOI: 10.1016/S0257-8972(97)00396-4 Document Type: Article

Times cited : (20)

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