Development of specimen and test method for strength analysis of MEMS micromirror

Engineering Fracture Mechanics

Volumn 72, Issue 17, 2005, Pages 2672-2685

  Izumi, Satoshi ^a   Ping, Chan Wee ^a   Yamaguchi, Makoto ^a   Sakai, Shinsuke ^a   Ueda, Yuzuru ^b   Suzuki, Atsushi ^b  

^a UNIVERSITY OF TOKYO   (Japan)

^b NIPPON SIGNAL CO LTD   (Japan)

Author keywords

Brittle fracture; Finite element method; Fracture mechanics; Load factor; MEMS; Torsion; Weibull distribution

Indexed keywords

BRITTLE FRACTURE; FINITE ELEMENT METHOD; FRACTURE TESTING; MICROELECTROMECHANICAL DEVICES; STRENGTH OF MATERIALS; STRESS CONCENTRATION; STRESSES; TORSION TESTING; WEIBULL DISTRIBUTION;

LOAD FACTOR; MICROELECTROMECHANICAL SYSTEMS; MICROMIRROR;

FRACTURE MECHANICS;

FRACTURE MECHANICS;

EID: 23844486730     PISSN: 00137944     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.engfracmech.2005.03.011     Document Type: Article

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