Micro tensile-test of silicon film having different crystallographic orientations

International Conference on Solid-State Sensors and Actuators, Proceedings

Volumn 1, Issue , 1997, Pages 595-598

  Sato, Kazuo ^a   Shikida, Mitsuhiro ^a   Yoshioka, Tetsuo ^a   Ando, Taeko ^a   Kawabata, Tatsuo ^a  

^a NAGOYA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL ORIENTATION; CRYSTALLOGRAPHY; ELASTIC MODULI; SEMICONDUCTING SILICON; SINGLE CRYSTALS; STRAIN; TENSILE TESTING;

TENSILE AXIS;

SEMICONDUCTING FILMS;

EID: 0030658386     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)