The fracture strength of nitrogen doped silicon wafers

Materials Science and Engineering B

Volumn 36, Issue 1-3, 1996, Pages 246-250

  Vedde, Jan ^a   Gravesen, Peter ^b  

^a Topsil Semiconductor Materials AS   (Denmark)

^b DANFOSS A S   (Denmark)

Author keywords

Fracture strength; Nitrogen; Silicon; Structure defects; Surface stress

Indexed keywords

EID: 0007046532     PISSN: 09215107     EISSN: None     Source Type: Journal    
DOI: 10.1016/0921-5107(95)01258-3     Document Type: Article

References (10)

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10. J. Vedde and P. Gravesen, to be published.