Viscous drag force effect on transportation of sub-micron particle contaminants during dry and steam laser cleaning

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5713, Issue , 2005, Pages 528-538

  Kudryashov, Sergey I ^a   Allen, Susan D ^a  

^a ARKANSAS STATE UNIVERSITY   (United States)

Author keywords

Critical surfaces; Dry and steam laser cleaning; Microelectronics; Nano and micro contaminants

Indexed keywords

CLEANING; DIFFUSION; ELEMENTARY PARTICLES; GAS DYNAMICS; LASERS; MICROELECTRONICS; PARTICLE SIZE ANALYSIS; SUBSTRATES; VISCOUS FLOW;

CRITICAL SURFACES; DROPLETS; DRY AND STEAM LASER CLEANING; NANO- AND MICRO-CONTAMINANTS;

IMPURITIES;

EID: 23644436011     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.587101     Document Type: Conference Paper

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